7/13/2011	10:42:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2011	10:42:50 AM	Recipe started at 10:42 AM
7/13/2011	10:42:50 AM	H2 valve closed
7/13/2011	10:42:50 AM	BCl3 valve closed
7/13/2011	10:42:50 AM	PH3 valve closed
7/13/2011	10:42:50 AM	SiCl4 pre valve closed
7/13/2011	10:42:50 AM	SiCl4 post valve closed
7/13/2011	10:42:50 AM	Main Vac valve closed
7/13/2011	10:42:50 AM	Bypass valve closed
7/13/2011	10:42:50 AM	Bubbler valve closed
7/13/2011	10:42:50 AM	Helium valve opened
7/13/2011	10:42:50 AM	Helium MFC set to  500.000000
7/13/2011	10:42:50 AM	H2 MFC set to  0.000000
7/13/2011	10:42:50 AM	BCl3 MFC set to  0.000000
7/13/2011	10:42:50 AM	PHl3 MFC set to  0.000000
7/13/2011	10:42:50 AM	SiCl4 MFC set to  0.000000
7/13/2011	10:42:50 AM	Bypass solenoid MFC set to  0.000000
7/13/2011	10:42:50 AM	Tube furnace set to 0
7/13/2011	10:43:57 AM	Helium valve closed
7/13/2011	10:43:57 AM	H2 valve closed
7/13/2011	10:43:57 AM	BCl3 valve closed
7/13/2011	10:43:57 AM	PH3 valve closed
7/13/2011	10:43:57 AM	SiCl4 pre valve closed
7/13/2011	10:43:57 AM	SiCl4 post valve closed
7/13/2011	10:43:57 AM	Main Vac valve closed
7/13/2011	10:43:57 AM	Bypass valve closed
7/13/2011	10:43:57 AM	Bubbler valve closed
7/13/2011	10:43:57 AM	Helium MFC set to  0.000000
7/13/2011	10:43:57 AM	H2 MFC set to  0.000000
7/13/2011	10:43:57 AM	BCl3 MFC set to  0.000000
7/13/2011	10:43:57 AM	PHl3 MFC set to  0.000000
7/13/2011	10:43:57 AM	SiCl4 MFC set to  0.000000
7/13/2011	10:43:57 AM	Bypass solenoid MFC set to  0.000000
7/13/2011	10:43:57 AM	Tube furnace set to 0
7/13/2011	10:43:58 AM	Run finished at 10:43 AM
7/13/2011	10:43:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2011	10:49:30 AM	Bypass valve opened
7/13/2011	10:54:21 AM	Bypass valve closed
7/13/2011	10:54:22 AM	Main Vac valve opened
7/13/2011	10:54:33 AM	Main Vac valve closed
7/13/2011	10:54:38 AM	Helium MFC set to  500.000000
7/13/2011	10:54:39 AM	Helium valve opened
7/13/2011	10:55:10 AM	Helium MFC set to  500.000000
7/13/2011	10:55:10 AM	Helium valve closed
7/13/2011	10:55:13 AM	Helium MFC set to  0.000000
7/13/2011	10:55:15 AM	Bypass valve opened
7/13/2011	10:56:16 AM	Bypass valve closed
7/13/2011	10:56:17 AM	Main Vac valve opened
7/13/2011	11:09:56 AM	Main Vac valve closed
7/13/2011	11:10:06 AM	Main Vac valve opened
7/13/2011	11:12:10 AM	Recipe started at 11:12 AM
7/13/2011	11:12:10 AM	Helium valve closed
7/13/2011	11:12:10 AM	H2 valve closed
7/13/2011	11:12:10 AM	BCl3 valve closed
7/13/2011	11:12:10 AM	PH3 valve closed
7/13/2011	11:12:10 AM	SiCl4 pre valve closed
7/13/2011	11:12:10 AM	SiCl4 post valve closed
7/13/2011	11:12:10 AM	Main Vac valve closed
7/13/2011	11:12:10 AM	Bypass valve closed
7/13/2011	11:12:10 AM	Bubbler valve closed
7/13/2011	11:12:10 AM	Helium MFC set to  0.000000
7/13/2011	11:12:10 AM	H2 MFC set to  0.000000
7/13/2011	11:12:10 AM	BCl3 MFC set to  0.000000
7/13/2011	11:12:10 AM	PHl3 MFC set to  0.000000
7/13/2011	11:12:10 AM	SiCl4 MFC set to  0.000000
7/13/2011	11:12:10 AM	Bypass solenoid MFC set to  0.000000
7/13/2011	11:12:10 AM	Tube furnace set to 0
7/13/2011	11:12:13 AM	Helium valve closed
7/13/2011	11:12:13 AM	BCl3 valve closed
7/13/2011	11:12:13 AM	PH3 valve closed
7/13/2011	11:12:13 AM	SiCl4 pre valve closed
7/13/2011	11:12:13 AM	SiCl4 post valve closed
7/13/2011	11:12:13 AM	Main Vac valve closed
7/13/2011	11:12:13 AM	Bypass valve closed
7/13/2011	11:12:13 AM	Bubbler valve closed
7/13/2011	11:12:13 AM	H2 valve opened
7/13/2011	11:12:13 AM	Helium MFC set to  0.000000
7/13/2011	11:12:13 AM	H2 MFC set to  500.000000
7/13/2011	11:12:13 AM	BCl3 MFC set to  0.000000
7/13/2011	11:12:13 AM	PHl3 MFC set to  0.000000
7/13/2011	11:12:13 AM	SiCl4 MFC set to  0.000000
7/13/2011	11:12:13 AM	Bypass solenoid MFC set to  0.000000
7/13/2011	11:12:13 AM	Tube furnace set to 0
7/13/2011	11:13:19 AM	Helium valve closed
7/13/2011	11:13:19 AM	BCl3 valve closed
7/13/2011	11:13:19 AM	PH3 valve closed
7/13/2011	11:13:19 AM	SiCl4 pre valve closed
7/13/2011	11:13:19 AM	SiCl4 post valve closed
7/13/2011	11:13:19 AM	Main Vac valve closed
7/13/2011	11:13:19 AM	Bypass valve closed
7/13/2011	11:13:20 AM	H2 valve opened
7/13/2011	11:13:20 AM	Bubbler valve opened
7/13/2011	11:13:20 AM	Helium MFC set to  0.000000
7/13/2011	11:13:20 AM	H2 MFC set to  500.000000
7/13/2011	11:13:20 AM	BCl3 MFC set to  0.000000
7/13/2011	11:13:20 AM	PHl3 MFC set to  0.000000
7/13/2011	11:13:20 AM	SiCl4 MFC set to  0.000000
7/13/2011	11:13:20 AM	Bypass solenoid MFC set to  0.000000
7/13/2011	11:13:20 AM	Tube furnace set to 0
7/13/2011	11:13:21 AM	Helium valve closed
7/13/2011	11:13:21 AM	BCl3 valve closed
7/13/2011	11:13:21 AM	PH3 valve closed
7/13/2011	11:13:21 AM	SiCl4 pre valve closed
7/13/2011	11:13:21 AM	SiCl4 post valve closed
7/13/2011	11:13:21 AM	Main Vac valve closed
7/13/2011	11:13:21 AM	Bypass valve closed
7/13/2011	11:13:21 AM	H2 valve opened
7/13/2011	11:13:21 AM	Bubbler valve opened
7/13/2011	11:13:21 AM	Helium MFC set to  0.000000
7/13/2011	11:13:21 AM	H2 MFC set to  500.000000
7/13/2011	11:13:21 AM	BCl3 MFC set to  0.000000
7/13/2011	11:13:21 AM	PHl3 MFC set to  0.000000
7/13/2011	11:13:21 AM	SiCl4 MFC set to  0.000000
7/13/2011	11:13:21 AM	Bypass solenoid MFC set to  0.000000
7/13/2011	11:13:21 AM	Tube furnace set to 1000
7/13/2011	11:33:21 AM	Helium valve closed
7/13/2011	11:33:21 AM	BCl3 valve closed
7/13/2011	11:33:21 AM	PH3 valve closed
7/13/2011	11:33:21 AM	Main Vac valve closed
7/13/2011	11:33:21 AM	Bypass valve closed
7/13/2011	11:33:21 AM	H2 valve opened
7/13/2011	11:33:21 AM	SiCl4 pre valve opened
7/13/2011	11:33:21 AM	SiCl4 post valve opened
7/13/2011	11:33:21 AM	Bubbler valve opened
7/13/2011	11:33:21 AM	Helium MFC set to  0.000000
7/13/2011	11:33:21 AM	H2 MFC set to  500.000000
7/13/2011	11:33:21 AM	BCl3 MFC set to  0.000000
7/13/2011	11:33:21 AM	PHl3 MFC set to  0.000000
7/13/2011	11:33:21 AM	SiCl4 MFC set to  50.000000
7/13/2011	11:33:21 AM	Bypass solenoid MFC set to  0.000000
7/13/2011	11:33:21 AM	Tube furnace set to 1000
7/13/2011	11:53:21 AM	Helium valve closed
7/13/2011	11:53:21 AM	BCl3 valve closed
7/13/2011	11:53:21 AM	PH3 valve closed
7/13/2011	11:53:21 AM	SiCl4 pre valve closed
7/13/2011	11:53:21 AM	SiCl4 post valve closed
7/13/2011	11:53:21 AM	Main Vac valve closed
7/13/2011	11:53:21 AM	Bypass valve closed
7/13/2011	11:53:21 AM	H2 valve opened
7/13/2011	11:53:21 AM	Bubbler valve opened
7/13/2011	11:53:21 AM	Helium MFC set to  0.000000
7/13/2011	11:53:21 AM	H2 MFC set to  500.000000
7/13/2011	11:53:21 AM	BCl3 MFC set to  0.000000
7/13/2011	11:53:21 AM	PHl3 MFC set to  0.000000
7/13/2011	11:53:21 AM	SiCl4 MFC set to  0.000000
7/13/2011	11:53:21 AM	Bypass solenoid MFC set to  0.000000
7/13/2011	11:53:21 AM	Tube furnace set to 950
7/13/2011	11:56:21 AM	H2 valve closed
7/13/2011	11:56:21 AM	BCl3 valve closed
7/13/2011	11:56:21 AM	PH3 valve closed
7/13/2011	11:56:21 AM	SiCl4 pre valve closed
7/13/2011	11:56:21 AM	SiCl4 post valve closed
7/13/2011	11:56:21 AM	Main Vac valve closed
7/13/2011	11:56:21 AM	Bypass valve closed
7/13/2011	11:56:21 AM	Helium valve opened
7/13/2011	11:56:21 AM	Bubbler valve opened
7/13/2011	11:56:21 AM	Helium MFC set to  500.000000
7/13/2011	11:56:21 AM	H2 MFC set to  0.000000
7/13/2011	11:56:21 AM	BCl3 MFC set to  0.000000
7/13/2011	11:56:21 AM	PHl3 MFC set to  0.000000
7/13/2011	11:56:21 AM	SiCl4 MFC set to  0.000000
7/13/2011	11:56:21 AM	Bypass solenoid MFC set to  0.000000
7/13/2011	11:56:21 AM	Tube furnace set to 900
7/13/2011	11:59:21 AM	H2 valve closed
7/13/2011	11:59:21 AM	BCl3 valve closed
7/13/2011	11:59:21 AM	PH3 valve closed
7/13/2011	11:59:21 AM	SiCl4 pre valve closed
7/13/2011	11:59:21 AM	SiCl4 post valve closed
7/13/2011	11:59:21 AM	Main Vac valve closed
7/13/2011	11:59:21 AM	Bypass valve closed
7/13/2011	11:59:21 AM	Helium valve opened
7/13/2011	11:59:21 AM	Bubbler valve opened
7/13/2011	11:59:21 AM	Helium MFC set to  500.000000
7/13/2011	11:59:21 AM	H2 MFC set to  0.000000
7/13/2011	11:59:21 AM	BCl3 MFC set to  0.000000
7/13/2011	11:59:21 AM	PHl3 MFC set to  0.000000
7/13/2011	11:59:21 AM	SiCl4 MFC set to  0.000000
7/13/2011	11:59:21 AM	Bypass solenoid MFC set to  0.000000
7/13/2011	11:59:22 AM	Tube furnace set to 850
7/13/2011	12:02:22 PM	H2 valve closed
7/13/2011	12:02:22 PM	BCl3 valve closed
7/13/2011	12:02:22 PM	PH3 valve closed
7/13/2011	12:02:22 PM	SiCl4 pre valve closed
7/13/2011	12:02:22 PM	SiCl4 post valve closed
7/13/2011	12:02:22 PM	Main Vac valve closed
7/13/2011	12:02:22 PM	Bypass valve closed
7/13/2011	12:02:22 PM	Helium valve opened
7/13/2011	12:02:22 PM	Bubbler valve opened
7/13/2011	12:02:22 PM	Helium MFC set to  500.000000
7/13/2011	12:02:22 PM	H2 MFC set to  0.000000
7/13/2011	12:02:22 PM	BCl3 MFC set to  0.000000
7/13/2011	12:02:22 PM	PHl3 MFC set to  0.000000
7/13/2011	12:02:22 PM	SiCl4 MFC set to  0.000000
7/13/2011	12:02:22 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	12:02:22 PM	Tube furnace set to 800
7/13/2011	12:05:22 PM	H2 valve closed
7/13/2011	12:05:22 PM	BCl3 valve closed
7/13/2011	12:05:22 PM	PH3 valve closed
7/13/2011	12:05:22 PM	SiCl4 pre valve closed
7/13/2011	12:05:22 PM	SiCl4 post valve closed
7/13/2011	12:05:22 PM	Main Vac valve closed
7/13/2011	12:05:22 PM	Bypass valve closed
7/13/2011	12:05:22 PM	Helium valve opened
7/13/2011	12:05:22 PM	Bubbler valve opened
7/13/2011	12:05:22 PM	Helium MFC set to  500.000000
7/13/2011	12:05:22 PM	H2 MFC set to  0.000000
7/13/2011	12:05:22 PM	BCl3 MFC set to  0.000000
7/13/2011	12:05:22 PM	PHl3 MFC set to  0.000000
7/13/2011	12:05:22 PM	SiCl4 MFC set to  0.000000
7/13/2011	12:05:22 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	12:05:22 PM	Tube furnace set to 750
7/13/2011	12:08:22 PM	H2 valve closed
7/13/2011	12:08:22 PM	BCl3 valve closed
7/13/2011	12:08:22 PM	PH3 valve closed
7/13/2011	12:08:22 PM	SiCl4 pre valve closed
7/13/2011	12:08:22 PM	SiCl4 post valve closed
7/13/2011	12:08:22 PM	Main Vac valve closed
7/13/2011	12:08:22 PM	Bypass valve closed
7/13/2011	12:08:22 PM	Helium valve opened
7/13/2011	12:08:22 PM	Bubbler valve opened
7/13/2011	12:08:22 PM	Helium MFC set to  500.000000
7/13/2011	12:08:22 PM	H2 MFC set to  0.000000
7/13/2011	12:08:22 PM	BCl3 MFC set to  0.000000
7/13/2011	12:08:22 PM	PHl3 MFC set to  0.000000
7/13/2011	12:08:22 PM	SiCl4 MFC set to  0.000000
7/13/2011	12:08:22 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	12:08:22 PM	Tube furnace set to 0
7/13/2011	12:28:22 PM	Helium valve closed
7/13/2011	12:28:22 PM	H2 valve closed
7/13/2011	12:28:22 PM	BCl3 valve closed
7/13/2011	12:28:22 PM	PH3 valve closed
7/13/2011	12:28:22 PM	SiCl4 pre valve closed
7/13/2011	12:28:22 PM	SiCl4 post valve closed
7/13/2011	12:28:22 PM	Main Vac valve closed
7/13/2011	12:28:22 PM	Bypass valve closed
7/13/2011	12:28:22 PM	Bubbler valve closed
7/13/2011	12:28:22 PM	Helium MFC set to  0.000000
7/13/2011	12:28:22 PM	H2 MFC set to  0.000000
7/13/2011	12:28:22 PM	BCl3 MFC set to  0.000000
7/13/2011	12:28:22 PM	PHl3 MFC set to  0.000000
7/13/2011	12:28:22 PM	SiCl4 MFC set to  0.000000
7/13/2011	12:28:22 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	12:28:22 PM	Tube furnace set to 0
7/13/2011	12:28:23 PM	Run finished at 12:28 PM
7/13/2011	1:12:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2011	1:12:33 PM	Recipe started at 1:12 PM
7/13/2011	1:12:33 PM	Helium valve closed
7/13/2011	1:12:33 PM	H2 valve closed
7/13/2011	1:12:33 PM	BCl3 valve closed
7/13/2011	1:12:33 PM	PH3 valve closed
7/13/2011	1:12:33 PM	SiCl4 pre valve closed
7/13/2011	1:12:33 PM	SiCl4 post valve closed
7/13/2011	1:12:33 PM	Main Vac valve closed
7/13/2011	1:12:33 PM	Bypass valve closed
7/13/2011	1:12:33 PM	Bubbler valve closed
7/13/2011	1:12:33 PM	Helium MFC set to  0.000000
7/13/2011	1:12:33 PM	H2 MFC set to  0.000000
7/13/2011	1:12:33 PM	BCl3 MFC set to  0.000000
7/13/2011	1:12:33 PM	PHl3 MFC set to  0.000000
7/13/2011	1:12:33 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:12:33 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:12:33 PM	Tube furnace set to 0
7/13/2011	1:12:36 PM	H2 valve closed
7/13/2011	1:12:36 PM	BCl3 valve closed
7/13/2011	1:12:36 PM	PH3 valve closed
7/13/2011	1:12:36 PM	SiCl4 pre valve closed
7/13/2011	1:12:36 PM	SiCl4 post valve closed
7/13/2011	1:12:36 PM	Main Vac valve closed
7/13/2011	1:12:36 PM	Bypass valve closed
7/13/2011	1:12:36 PM	Bubbler valve closed
7/13/2011	1:12:37 PM	Helium valve opened
7/13/2011	1:12:37 PM	Helium MFC set to  500.000000
7/13/2011	1:12:37 PM	H2 MFC set to  0.000000
7/13/2011	1:12:37 PM	BCl3 MFC set to  0.000000
7/13/2011	1:12:37 PM	PHl3 MFC set to  0.000000
7/13/2011	1:12:37 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:12:37 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:12:37 PM	Tube furnace set to 0
7/13/2011	1:12:39 PM	Helium valve closed
7/13/2011	1:12:39 PM	H2 valve closed
7/13/2011	1:12:39 PM	BCl3 valve closed
7/13/2011	1:12:39 PM	PH3 valve closed
7/13/2011	1:12:39 PM	SiCl4 pre valve closed
7/13/2011	1:12:39 PM	SiCl4 post valve closed
7/13/2011	1:12:39 PM	Main Vac valve closed
7/13/2011	1:12:39 PM	Bypass valve closed
7/13/2011	1:12:39 PM	Bubbler valve closed
7/13/2011	1:12:39 PM	Helium MFC set to  0.000000
7/13/2011	1:12:39 PM	H2 MFC set to  0.000000
7/13/2011	1:12:39 PM	BCl3 MFC set to  0.000000
7/13/2011	1:12:39 PM	PHl3 MFC set to  0.000000
7/13/2011	1:12:39 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:12:39 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:12:39 PM	Tube furnace set to 0
7/13/2011	1:12:40 PM	Run finished at 1:12 PM
7/13/2011	1:12:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2011	1:17:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2011	1:17:40 PM	Recipe started at 1:17 PM
7/13/2011	1:17:40 PM	Helium valve closed
7/13/2011	1:17:40 PM	H2 valve closed
7/13/2011	1:17:40 PM	BCl3 valve closed
7/13/2011	1:17:40 PM	PH3 valve closed
7/13/2011	1:17:40 PM	SiCl4 pre valve closed
7/13/2011	1:17:40 PM	SiCl4 post valve closed
7/13/2011	1:17:40 PM	Main Vac valve closed
7/13/2011	1:17:40 PM	Bypass valve closed
7/13/2011	1:17:40 PM	Bubbler valve closed
7/13/2011	1:17:40 PM	Helium MFC set to  0.000000
7/13/2011	1:17:40 PM	H2 MFC set to  0.000000
7/13/2011	1:17:40 PM	BCl3 MFC set to  0.000000
7/13/2011	1:17:40 PM	PHl3 MFC set to  0.000000
7/13/2011	1:17:40 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:17:40 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:17:40 PM	Tube furnace set to 0
7/13/2011	1:17:43 PM	H2 valve closed
7/13/2011	1:17:43 PM	BCl3 valve closed
7/13/2011	1:17:43 PM	PH3 valve closed
7/13/2011	1:17:43 PM	SiCl4 pre valve closed
7/13/2011	1:17:43 PM	SiCl4 post valve closed
7/13/2011	1:17:43 PM	Main Vac valve closed
7/13/2011	1:17:43 PM	Bypass valve closed
7/13/2011	1:17:43 PM	Bubbler valve closed
7/13/2011	1:17:43 PM	Helium valve opened
7/13/2011	1:17:43 PM	Helium MFC set to  500.000000
7/13/2011	1:17:43 PM	H2 MFC set to  0.000000
7/13/2011	1:17:43 PM	BCl3 MFC set to  0.000000
7/13/2011	1:17:43 PM	PHl3 MFC set to  0.000000
7/13/2011	1:17:43 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:17:43 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:17:44 PM	Tube furnace set to 0
7/13/2011	1:17:47 PM	Helium valve closed
7/13/2011	1:17:47 PM	H2 valve closed
7/13/2011	1:17:47 PM	BCl3 valve closed
7/13/2011	1:17:47 PM	PH3 valve closed
7/13/2011	1:17:47 PM	SiCl4 pre valve closed
7/13/2011	1:17:47 PM	SiCl4 post valve closed
7/13/2011	1:17:47 PM	Main Vac valve closed
7/13/2011	1:17:47 PM	Bypass valve closed
7/13/2011	1:17:47 PM	Bubbler valve closed
7/13/2011	1:17:47 PM	Helium MFC set to  0.000000
7/13/2011	1:17:47 PM	H2 MFC set to  0.000000
7/13/2011	1:17:47 PM	BCl3 MFC set to  0.000000
7/13/2011	1:17:47 PM	PHl3 MFC set to  0.000000
7/13/2011	1:17:47 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:17:47 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:17:47 PM	Tube furnace set to 0
7/13/2011	1:17:48 PM	Run finished at 1:17 PM
7/13/2011	1:17:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2011	1:20:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/13/2011	1:20:58 PM	Recipe started at 1:20 PM
7/13/2011	1:20:58 PM	Helium valve closed
7/13/2011	1:20:58 PM	H2 valve closed
7/13/2011	1:20:58 PM	BCl3 valve closed
7/13/2011	1:20:58 PM	PH3 valve closed
7/13/2011	1:20:58 PM	SiCl4 pre valve closed
7/13/2011	1:20:58 PM	SiCl4 post valve closed
7/13/2011	1:20:58 PM	Main Vac valve closed
7/13/2011	1:20:58 PM	Bubbler valve closed
7/13/2011	1:20:58 PM	Bypass valve opened
7/13/2011	1:20:58 PM	Helium MFC set to  0.000000
7/13/2011	1:20:58 PM	H2 MFC set to  0.000000
7/13/2011	1:20:58 PM	BCl3 MFC set to  0.000000
7/13/2011	1:20:58 PM	PHl3 MFC set to  0.000000
7/13/2011	1:20:58 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:20:58 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:20:59 PM	Tube furnace set to 0
7/13/2011	1:21:57 PM	Helium valve closed
7/13/2011	1:21:57 PM	H2 valve closed
7/13/2011	1:21:57 PM	BCl3 valve closed
7/13/2011	1:21:57 PM	PH3 valve closed
7/13/2011	1:21:57 PM	SiCl4 pre valve closed
7/13/2011	1:21:57 PM	SiCl4 post valve closed
7/13/2011	1:21:57 PM	Main Vac valve closed
7/13/2011	1:21:57 PM	Bubbler valve closed
7/13/2011	1:21:57 PM	Bypass valve opened
7/13/2011	1:21:57 PM	Helium MFC set to  0.000000
7/13/2011	1:21:57 PM	H2 MFC set to  0.000000
7/13/2011	1:21:57 PM	BCl3 MFC set to  0.000000
7/13/2011	1:21:57 PM	PHl3 MFC set to  0.000000
7/13/2011	1:21:57 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:21:57 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:21:57 PM	Tube furnace set to 0
7/13/2011	1:22:19 PM	Helium valve closed
7/13/2011	1:22:19 PM	H2 valve closed
7/13/2011	1:22:19 PM	BCl3 valve closed
7/13/2011	1:22:19 PM	PH3 valve closed
7/13/2011	1:22:19 PM	SiCl4 pre valve closed
7/13/2011	1:22:19 PM	SiCl4 post valve closed
7/13/2011	1:22:19 PM	Bypass valve closed
7/13/2011	1:22:19 PM	Bubbler valve closed
7/13/2011	1:22:19 PM	Main Vac valve opened
7/13/2011	1:22:19 PM	Helium MFC set to  0.000000
7/13/2011	1:22:19 PM	H2 MFC set to  0.000000
7/13/2011	1:22:19 PM	BCl3 MFC set to  0.000000
7/13/2011	1:22:19 PM	PHl3 MFC set to  0.000000
7/13/2011	1:22:19 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:22:19 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:22:19 PM	Tube furnace set to 0
7/13/2011	1:22:20 PM	Run finished at 1:22 PM
7/13/2011	1:22:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/13/2011	1:23:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2011	1:23:33 PM	Recipe started at 1:23 PM
7/13/2011	1:23:33 PM	Helium valve closed
7/13/2011	1:23:33 PM	H2 valve closed
7/13/2011	1:23:33 PM	BCl3 valve closed
7/13/2011	1:23:33 PM	PH3 valve closed
7/13/2011	1:23:33 PM	SiCl4 pre valve closed
7/13/2011	1:23:33 PM	SiCl4 post valve closed
7/13/2011	1:23:33 PM	Main Vac valve closed
7/13/2011	1:23:33 PM	Bypass valve closed
7/13/2011	1:23:33 PM	Bubbler valve closed
7/13/2011	1:23:33 PM	Helium MFC set to  0.000000
7/13/2011	1:23:33 PM	H2 MFC set to  0.000000
7/13/2011	1:23:33 PM	BCl3 MFC set to  0.000000
7/13/2011	1:23:33 PM	PHl3 MFC set to  0.000000
7/13/2011	1:23:33 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:23:33 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:23:33 PM	Tube furnace set to 0
7/13/2011	1:23:36 PM	H2 valve closed
7/13/2011	1:23:36 PM	BCl3 valve closed
7/13/2011	1:23:36 PM	PH3 valve closed
7/13/2011	1:23:36 PM	SiCl4 pre valve closed
7/13/2011	1:23:36 PM	SiCl4 post valve closed
7/13/2011	1:23:36 PM	Main Vac valve closed
7/13/2011	1:23:36 PM	Bypass valve closed
7/13/2011	1:23:36 PM	Bubbler valve closed
7/13/2011	1:23:36 PM	Helium valve opened
7/13/2011	1:23:36 PM	Helium MFC set to  500.000000
7/13/2011	1:23:36 PM	H2 MFC set to  0.000000
7/13/2011	1:23:36 PM	BCl3 MFC set to  0.000000
7/13/2011	1:23:36 PM	PHl3 MFC set to  0.000000
7/13/2011	1:23:36 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:23:36 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:23:36 PM	Tube furnace set to 0
7/13/2011	1:24:09 PM	Helium valve closed
7/13/2011	1:24:09 PM	H2 valve closed
7/13/2011	1:24:09 PM	BCl3 valve closed
7/13/2011	1:24:09 PM	PH3 valve closed
7/13/2011	1:24:09 PM	SiCl4 pre valve closed
7/13/2011	1:24:09 PM	SiCl4 post valve closed
7/13/2011	1:24:09 PM	Main Vac valve closed
7/13/2011	1:24:09 PM	Bypass valve closed
7/13/2011	1:24:09 PM	Bubbler valve closed
7/13/2011	1:24:09 PM	Helium MFC set to  0.000000
7/13/2011	1:24:09 PM	H2 MFC set to  0.000000
7/13/2011	1:24:09 PM	BCl3 MFC set to  0.000000
7/13/2011	1:24:09 PM	PHl3 MFC set to  0.000000
7/13/2011	1:24:09 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:24:09 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:24:09 PM	Tube furnace set to 0
7/13/2011	1:24:10 PM	Run finished at 1:24 PM
7/13/2011	1:24:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2011	1:24:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/13/2011	1:24:12 PM	Recipe started at 1:24 PM
7/13/2011	1:24:12 PM	Helium valve closed
7/13/2011	1:24:12 PM	H2 valve closed
7/13/2011	1:24:12 PM	BCl3 valve closed
7/13/2011	1:24:12 PM	PH3 valve closed
7/13/2011	1:24:12 PM	SiCl4 pre valve closed
7/13/2011	1:24:12 PM	SiCl4 post valve closed
7/13/2011	1:24:12 PM	Main Vac valve closed
7/13/2011	1:24:12 PM	Bubbler valve closed
7/13/2011	1:24:12 PM	Bypass valve opened
7/13/2011	1:24:12 PM	Helium MFC set to  0.000000
7/13/2011	1:24:12 PM	H2 MFC set to  0.000000
7/13/2011	1:24:12 PM	BCl3 MFC set to  0.000000
7/13/2011	1:24:12 PM	PHl3 MFC set to  0.000000
7/13/2011	1:24:12 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:24:12 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:24:12 PM	Tube furnace set to 0
7/13/2011	1:25:01 PM	Helium valve closed
7/13/2011	1:25:01 PM	H2 valve closed
7/13/2011	1:25:01 PM	BCl3 valve closed
7/13/2011	1:25:01 PM	PH3 valve closed
7/13/2011	1:25:01 PM	SiCl4 pre valve closed
7/13/2011	1:25:01 PM	SiCl4 post valve closed
7/13/2011	1:25:01 PM	Main Vac valve closed
7/13/2011	1:25:01 PM	Bubbler valve closed
7/13/2011	1:25:01 PM	Bypass valve opened
7/13/2011	1:25:01 PM	Helium MFC set to  0.000000
7/13/2011	1:25:01 PM	H2 MFC set to  0.000000
7/13/2011	1:25:01 PM	BCl3 MFC set to  0.000000
7/13/2011	1:25:01 PM	PHl3 MFC set to  0.000000
7/13/2011	1:25:01 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:25:01 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:25:01 PM	Tube furnace set to 0
7/13/2011	1:25:18 PM	Helium valve closed
7/13/2011	1:25:18 PM	H2 valve closed
7/13/2011	1:25:18 PM	BCl3 valve closed
7/13/2011	1:25:18 PM	PH3 valve closed
7/13/2011	1:25:18 PM	SiCl4 pre valve closed
7/13/2011	1:25:18 PM	SiCl4 post valve closed
7/13/2011	1:25:18 PM	Bypass valve closed
7/13/2011	1:25:18 PM	Bubbler valve closed
7/13/2011	1:25:18 PM	Main Vac valve opened
7/13/2011	1:25:18 PM	Helium MFC set to  0.000000
7/13/2011	1:25:18 PM	H2 MFC set to  0.000000
7/13/2011	1:25:18 PM	BCl3 MFC set to  0.000000
7/13/2011	1:25:18 PM	PHl3 MFC set to  0.000000
7/13/2011	1:25:18 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:25:18 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:25:18 PM	Tube furnace set to 0
7/13/2011	1:25:19 PM	Run finished at 1:25 PM
7/13/2011	1:25:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/13/2011	1:25:47 PM	Main Vac valve closed
7/13/2011	1:25:55 PM	Main Vac valve opened
7/13/2011	1:26:26 PM	Helium MFC set to  2.000000
7/13/2011	1:26:28 PM	Helium valve opened
7/13/2011	1:26:41 PM	Helium MFC set to  5.000000
7/13/2011	1:26:49 PM	Helium MFC set to  10.000000
7/13/2011	1:27:14 PM	Helium MFC set to  20.000000
7/13/2011	1:27:29 PM	Helium valve closed
7/13/2011	1:27:45 PM	Helium valve opened
7/13/2011	1:28:06 PM	Helium valve closed
7/13/2011	1:49:26 PM	Main Vac valve closed
7/13/2011	1:49:36 PM	Main Vac valve opened
7/13/2011	1:50:15 PM	Recipe started at 1:50 PM
7/13/2011	1:50:15 PM	Helium valve closed
7/13/2011	1:50:15 PM	H2 valve closed
7/13/2011	1:50:15 PM	BCl3 valve closed
7/13/2011	1:50:15 PM	PH3 valve closed
7/13/2011	1:50:15 PM	SiCl4 pre valve closed
7/13/2011	1:50:15 PM	SiCl4 post valve closed
7/13/2011	1:50:15 PM	Main Vac valve closed
7/13/2011	1:50:15 PM	Bypass valve closed
7/13/2011	1:50:15 PM	Bubbler valve closed
7/13/2011	1:50:15 PM	Helium MFC set to  0.000000
7/13/2011	1:50:15 PM	H2 MFC set to  0.000000
7/13/2011	1:50:15 PM	BCl3 MFC set to  0.000000
7/13/2011	1:50:15 PM	PHl3 MFC set to  0.000000
7/13/2011	1:50:15 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:50:15 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:50:15 PM	Tube furnace set to 0
7/13/2011	1:50:18 PM	Helium valve closed
7/13/2011	1:50:18 PM	BCl3 valve closed
7/13/2011	1:50:18 PM	PH3 valve closed
7/13/2011	1:50:18 PM	SiCl4 pre valve closed
7/13/2011	1:50:18 PM	SiCl4 post valve closed
7/13/2011	1:50:18 PM	Main Vac valve closed
7/13/2011	1:50:18 PM	Bypass valve closed
7/13/2011	1:50:18 PM	Bubbler valve closed
7/13/2011	1:50:18 PM	H2 valve opened
7/13/2011	1:50:18 PM	Helium MFC set to  0.000000
7/13/2011	1:50:18 PM	H2 MFC set to  500.000000
7/13/2011	1:50:18 PM	BCl3 MFC set to  0.000000
7/13/2011	1:50:18 PM	PHl3 MFC set to  0.000000
7/13/2011	1:50:18 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:50:18 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:50:18 PM	Tube furnace set to 0
7/13/2011	1:51:21 PM	Helium valve closed
7/13/2011	1:51:21 PM	BCl3 valve closed
7/13/2011	1:51:21 PM	PH3 valve closed
7/13/2011	1:51:21 PM	SiCl4 pre valve closed
7/13/2011	1:51:21 PM	SiCl4 post valve closed
7/13/2011	1:51:21 PM	Main Vac valve closed
7/13/2011	1:51:21 PM	Bypass valve closed
7/13/2011	1:51:21 PM	H2 valve opened
7/13/2011	1:51:21 PM	Bubbler valve opened
7/13/2011	1:51:22 PM	Helium MFC set to  0.000000
7/13/2011	1:51:22 PM	H2 MFC set to  500.000000
7/13/2011	1:51:22 PM	BCl3 MFC set to  0.000000
7/13/2011	1:51:22 PM	PHl3 MFC set to  0.000000
7/13/2011	1:51:22 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:51:22 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:51:22 PM	Tube furnace set to 0
7/13/2011	1:51:23 PM	Helium valve closed
7/13/2011	1:51:23 PM	BCl3 valve closed
7/13/2011	1:51:23 PM	PH3 valve closed
7/13/2011	1:51:23 PM	SiCl4 pre valve closed
7/13/2011	1:51:23 PM	SiCl4 post valve closed
7/13/2011	1:51:23 PM	Main Vac valve closed
7/13/2011	1:51:23 PM	Bypass valve closed
7/13/2011	1:51:23 PM	H2 valve opened
7/13/2011	1:51:23 PM	Bubbler valve opened
7/13/2011	1:51:23 PM	Helium MFC set to  0.000000
7/13/2011	1:51:23 PM	H2 MFC set to  500.000000
7/13/2011	1:51:23 PM	BCl3 MFC set to  0.000000
7/13/2011	1:51:23 PM	PHl3 MFC set to  0.000000
7/13/2011	1:51:23 PM	SiCl4 MFC set to  0.000000
7/13/2011	1:51:23 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	1:51:23 PM	Tube furnace set to 1000
7/13/2011	2:11:23 PM	Helium valve closed
7/13/2011	2:11:23 PM	BCl3 valve closed
7/13/2011	2:11:23 PM	PH3 valve closed
7/13/2011	2:11:23 PM	Main Vac valve closed
7/13/2011	2:11:23 PM	Bypass valve closed
7/13/2011	2:11:23 PM	H2 valve opened
7/13/2011	2:11:23 PM	SiCl4 pre valve opened
7/13/2011	2:11:23 PM	SiCl4 post valve opened
7/13/2011	2:11:23 PM	Bubbler valve opened
7/13/2011	2:11:23 PM	Helium MFC set to  0.000000
7/13/2011	2:11:23 PM	H2 MFC set to  500.000000
7/13/2011	2:11:23 PM	BCl3 MFC set to  0.000000
7/13/2011	2:11:23 PM	PHl3 MFC set to  0.000000
7/13/2011	2:11:23 PM	SiCl4 MFC set to  50.000000
7/13/2011	2:11:23 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	2:11:23 PM	Tube furnace set to 1000
7/13/2011	2:31:23 PM	Helium valve closed
7/13/2011	2:31:23 PM	BCl3 valve closed
7/13/2011	2:31:23 PM	PH3 valve closed
7/13/2011	2:31:23 PM	SiCl4 pre valve closed
7/13/2011	2:31:23 PM	SiCl4 post valve closed
7/13/2011	2:31:23 PM	Main Vac valve closed
7/13/2011	2:31:23 PM	Bypass valve closed
7/13/2011	2:31:23 PM	H2 valve opened
7/13/2011	2:31:23 PM	Bubbler valve opened
7/13/2011	2:31:23 PM	Helium MFC set to  0.000000
7/13/2011	2:31:23 PM	H2 MFC set to  500.000000
7/13/2011	2:31:23 PM	BCl3 MFC set to  0.000000
7/13/2011	2:31:23 PM	PHl3 MFC set to  0.000000
7/13/2011	2:31:23 PM	SiCl4 MFC set to  0.000000
7/13/2011	2:31:23 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	2:31:23 PM	Tube furnace set to 950
7/13/2011	2:34:23 PM	H2 valve closed
7/13/2011	2:34:23 PM	BCl3 valve closed
7/13/2011	2:34:23 PM	PH3 valve closed
7/13/2011	2:34:23 PM	SiCl4 pre valve closed
7/13/2011	2:34:23 PM	SiCl4 post valve closed
7/13/2011	2:34:23 PM	Main Vac valve closed
7/13/2011	2:34:23 PM	Bypass valve closed
7/13/2011	2:34:23 PM	Helium valve opened
7/13/2011	2:34:23 PM	Bubbler valve opened
7/13/2011	2:34:23 PM	Helium MFC set to  500.000000
7/13/2011	2:34:23 PM	H2 MFC set to  0.000000
7/13/2011	2:34:23 PM	BCl3 MFC set to  0.000000
7/13/2011	2:34:23 PM	PHl3 MFC set to  0.000000
7/13/2011	2:34:23 PM	SiCl4 MFC set to  0.000000
7/13/2011	2:34:23 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	2:34:23 PM	Tube furnace set to 900
7/13/2011	2:37:23 PM	H2 valve closed
7/13/2011	2:37:23 PM	BCl3 valve closed
7/13/2011	2:37:23 PM	PH3 valve closed
7/13/2011	2:37:23 PM	SiCl4 pre valve closed
7/13/2011	2:37:23 PM	SiCl4 post valve closed
7/13/2011	2:37:24 PM	Main Vac valve closed
7/13/2011	2:37:24 PM	Bypass valve closed
7/13/2011	2:37:24 PM	Helium valve opened
7/13/2011	2:37:24 PM	Bubbler valve opened
7/13/2011	2:37:24 PM	Helium MFC set to  500.000000
7/13/2011	2:37:24 PM	H2 MFC set to  0.000000
7/13/2011	2:37:24 PM	BCl3 MFC set to  0.000000
7/13/2011	2:37:24 PM	PHl3 MFC set to  0.000000
7/13/2011	2:37:24 PM	SiCl4 MFC set to  0.000000
7/13/2011	2:37:24 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	2:37:24 PM	Tube furnace set to 850
7/13/2011	2:40:24 PM	H2 valve closed
7/13/2011	2:40:24 PM	BCl3 valve closed
7/13/2011	2:40:24 PM	PH3 valve closed
7/13/2011	2:40:24 PM	SiCl4 pre valve closed
7/13/2011	2:40:24 PM	SiCl4 post valve closed
7/13/2011	2:40:24 PM	Main Vac valve closed
7/13/2011	2:40:24 PM	Bypass valve closed
7/13/2011	2:40:24 PM	Helium valve opened
7/13/2011	2:40:24 PM	Bubbler valve opened
7/13/2011	2:40:24 PM	Helium MFC set to  500.000000
7/13/2011	2:40:24 PM	H2 MFC set to  0.000000
7/13/2011	2:40:24 PM	BCl3 MFC set to  0.000000
7/13/2011	2:40:24 PM	PHl3 MFC set to  0.000000
7/13/2011	2:40:24 PM	SiCl4 MFC set to  0.000000
7/13/2011	2:40:24 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	2:40:24 PM	Tube furnace set to 800
7/13/2011	2:43:24 PM	H2 valve closed
7/13/2011	2:43:24 PM	BCl3 valve closed
7/13/2011	2:43:24 PM	PH3 valve closed
7/13/2011	2:43:24 PM	SiCl4 pre valve closed
7/13/2011	2:43:24 PM	SiCl4 post valve closed
7/13/2011	2:43:24 PM	Main Vac valve closed
7/13/2011	2:43:24 PM	Bypass valve closed
7/13/2011	2:43:24 PM	Helium valve opened
7/13/2011	2:43:24 PM	Bubbler valve opened
7/13/2011	2:43:24 PM	Helium MFC set to  500.000000
7/13/2011	2:43:24 PM	H2 MFC set to  0.000000
7/13/2011	2:43:24 PM	BCl3 MFC set to  0.000000
7/13/2011	2:43:24 PM	PHl3 MFC set to  0.000000
7/13/2011	2:43:24 PM	SiCl4 MFC set to  0.000000
7/13/2011	2:43:24 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	2:43:24 PM	Tube furnace set to 750
7/13/2011	2:46:24 PM	H2 valve closed
7/13/2011	2:46:24 PM	BCl3 valve closed
7/13/2011	2:46:24 PM	PH3 valve closed
7/13/2011	2:46:24 PM	SiCl4 pre valve closed
7/13/2011	2:46:24 PM	SiCl4 post valve closed
7/13/2011	2:46:24 PM	Main Vac valve closed
7/13/2011	2:46:24 PM	Bypass valve closed
7/13/2011	2:46:24 PM	Helium valve opened
7/13/2011	2:46:24 PM	Bubbler valve opened
7/13/2011	2:46:24 PM	Helium MFC set to  500.000000
7/13/2011	2:46:24 PM	H2 MFC set to  0.000000
7/13/2011	2:46:24 PM	BCl3 MFC set to  0.000000
7/13/2011	2:46:24 PM	PHl3 MFC set to  0.000000
7/13/2011	2:46:24 PM	SiCl4 MFC set to  0.000000
7/13/2011	2:46:24 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	2:46:24 PM	Tube furnace set to 0
7/13/2011	3:06:24 PM	Helium valve closed
7/13/2011	3:06:24 PM	H2 valve closed
7/13/2011	3:06:24 PM	BCl3 valve closed
7/13/2011	3:06:24 PM	PH3 valve closed
7/13/2011	3:06:24 PM	SiCl4 pre valve closed
7/13/2011	3:06:24 PM	SiCl4 post valve closed
7/13/2011	3:06:24 PM	Main Vac valve closed
7/13/2011	3:06:24 PM	Bypass valve closed
7/13/2011	3:06:24 PM	Bubbler valve closed
7/13/2011	3:06:24 PM	Helium MFC set to  0.000000
7/13/2011	3:06:24 PM	H2 MFC set to  0.000000
7/13/2011	3:06:24 PM	BCl3 MFC set to  0.000000
7/13/2011	3:06:24 PM	PHl3 MFC set to  0.000000
7/13/2011	3:06:24 PM	SiCl4 MFC set to  0.000000
7/13/2011	3:06:24 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	3:06:24 PM	Tube furnace set to 0
7/13/2011	3:06:25 PM	Run finished at 3:06 PM
7/13/2011	5:14:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2011	5:14:55 PM	Recipe started at 5:14 PM
7/13/2011	5:14:55 PM	Helium valve closed
7/13/2011	5:14:55 PM	H2 valve closed
7/13/2011	5:14:55 PM	BCl3 valve closed
7/13/2011	5:14:55 PM	PH3 valve closed
7/13/2011	5:14:55 PM	SiCl4 pre valve closed
7/13/2011	5:14:55 PM	SiCl4 post valve closed
7/13/2011	5:14:55 PM	Main Vac valve closed
7/13/2011	5:14:55 PM	Bypass valve closed
7/13/2011	5:14:55 PM	Bubbler valve closed
7/13/2011	5:14:55 PM	Helium MFC set to  0.000000
7/13/2011	5:14:55 PM	H2 MFC set to  0.000000
7/13/2011	5:14:55 PM	BCl3 MFC set to  0.000000
7/13/2011	5:14:55 PM	PHl3 MFC set to  0.000000
7/13/2011	5:14:55 PM	SiCl4 MFC set to  0.000000
7/13/2011	5:14:55 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	5:14:56 PM	Tube furnace set to 0
7/13/2011	5:14:59 PM	H2 valve closed
7/13/2011	5:14:59 PM	BCl3 valve closed
7/13/2011	5:14:59 PM	PH3 valve closed
7/13/2011	5:14:59 PM	SiCl4 pre valve closed
7/13/2011	5:14:59 PM	SiCl4 post valve closed
7/13/2011	5:14:59 PM	Main Vac valve closed
7/13/2011	5:14:59 PM	Bypass valve closed
7/13/2011	5:14:59 PM	Bubbler valve closed
7/13/2011	5:14:59 PM	Helium valve opened
7/13/2011	5:14:59 PM	Helium MFC set to  500.000000
7/13/2011	5:14:59 PM	H2 MFC set to  0.000000
7/13/2011	5:14:59 PM	BCl3 MFC set to  0.000000
7/13/2011	5:14:59 PM	PHl3 MFC set to  0.000000
7/13/2011	5:14:59 PM	SiCl4 MFC set to  0.000000
7/13/2011	5:14:59 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	5:14:59 PM	Tube furnace set to 0
7/13/2011	5:15:01 PM	Helium valve closed
7/13/2011	5:15:01 PM	H2 valve closed
7/13/2011	5:15:01 PM	BCl3 valve closed
7/13/2011	5:15:01 PM	PH3 valve closed
7/13/2011	5:15:01 PM	SiCl4 pre valve closed
7/13/2011	5:15:01 PM	SiCl4 post valve closed
7/13/2011	5:15:01 PM	Main Vac valve closed
7/13/2011	5:15:01 PM	Bypass valve closed
7/13/2011	5:15:01 PM	Bubbler valve closed
7/13/2011	5:15:01 PM	Helium MFC set to  0.000000
7/13/2011	5:15:01 PM	H2 MFC set to  0.000000
7/13/2011	5:15:01 PM	BCl3 MFC set to  0.000000
7/13/2011	5:15:01 PM	PHl3 MFC set to  0.000000
7/13/2011	5:15:01 PM	SiCl4 MFC set to  0.000000
7/13/2011	5:15:01 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	5:15:01 PM	Tube furnace set to 0
7/13/2011	5:15:02 PM	Run finished at 5:15 PM
7/13/2011	5:15:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2011	5:22:40 PM	Bypass valve opened
7/13/2011	5:24:38 PM	Bypass valve closed
7/13/2011	5:24:38 PM	Main Vac valve opened
7/13/2011	5:25:45 PM	Helium MFC set to  20.000000
7/13/2011	5:25:46 PM	Helium valve opened
7/13/2011	5:28:00 PM	Helium valve closed
7/13/2011	5:30:01 PM	Main Vac valve closed
7/13/2011	5:30:22 PM	Main Vac valve opened
7/13/2011	5:30:23 PM	Helium valve opened
7/13/2011	5:31:51 PM	Helium valve closed
7/13/2011	5:31:53 PM	Tube furnace set to 100
7/13/2011	5:32:18 PM	Helium valve opened
7/13/2011	5:38:28 PM	Helium valve closed
7/13/2011	5:39:50 PM	Main Vac valve closed
7/13/2011	5:39:59 PM	Main Vac valve opened
7/13/2011	5:40:00 PM	Helium valve opened
7/13/2011	5:40:51 PM	Helium valve closed
7/13/2011	5:44:18 PM	Helium valve opened
7/13/2011	5:45:06 PM	Helium valve closed
7/13/2011	5:53:02 PM	Main Vac valve closed
7/13/2011	5:53:21 PM	Main Vac valve opened
7/13/2011	5:53:23 PM	Helium valve opened
7/13/2011	5:53:27 PM	Helium valve closed
7/13/2011	5:53:51 PM	Recipe started at 5:53 PM
7/13/2011	5:53:51 PM	Helium valve closed
7/13/2011	5:53:51 PM	H2 valve closed
7/13/2011	5:53:51 PM	BCl3 valve closed
7/13/2011	5:53:51 PM	PH3 valve closed
7/13/2011	5:53:51 PM	SiCl4 pre valve closed
7/13/2011	5:53:51 PM	SiCl4 post valve closed
7/13/2011	5:53:51 PM	Main Vac valve closed
7/13/2011	5:53:51 PM	Bypass valve closed
7/13/2011	5:53:51 PM	Bubbler valve closed
7/13/2011	5:53:51 PM	Helium MFC set to  0.000000
7/13/2011	5:53:51 PM	H2 MFC set to  0.000000
7/13/2011	5:53:51 PM	BCl3 MFC set to  0.000000
7/13/2011	5:53:51 PM	PHl3 MFC set to  0.000000
7/13/2011	5:53:51 PM	SiCl4 MFC set to  0.000000
7/13/2011	5:53:51 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	5:53:51 PM	Tube furnace set to 0
7/13/2011	5:53:54 PM	Helium valve closed
7/13/2011	5:53:54 PM	BCl3 valve closed
7/13/2011	5:53:54 PM	PH3 valve closed
7/13/2011	5:53:54 PM	SiCl4 pre valve closed
7/13/2011	5:53:54 PM	SiCl4 post valve closed
7/13/2011	5:53:54 PM	Main Vac valve closed
7/13/2011	5:53:54 PM	Bypass valve closed
7/13/2011	5:53:54 PM	Bubbler valve closed
7/13/2011	5:53:54 PM	H2 valve opened
7/13/2011	5:53:54 PM	Helium MFC set to  0.000000
7/13/2011	5:53:54 PM	H2 MFC set to  500.000000
7/13/2011	5:53:54 PM	BCl3 MFC set to  0.000000
7/13/2011	5:53:54 PM	PHl3 MFC set to  0.000000
7/13/2011	5:53:54 PM	SiCl4 MFC set to  0.000000
7/13/2011	5:53:54 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	5:53:54 PM	Tube furnace set to 0
7/13/2011	5:54:58 PM	Helium valve closed
7/13/2011	5:54:58 PM	BCl3 valve closed
7/13/2011	5:54:58 PM	PH3 valve closed
7/13/2011	5:54:58 PM	SiCl4 pre valve closed
7/13/2011	5:54:58 PM	SiCl4 post valve closed
7/13/2011	5:54:58 PM	Main Vac valve closed
7/13/2011	5:54:58 PM	Bypass valve closed
7/13/2011	5:54:58 PM	H2 valve opened
7/13/2011	5:54:58 PM	Bubbler valve opened
7/13/2011	5:54:58 PM	Helium MFC set to  0.000000
7/13/2011	5:54:59 PM	H2 MFC set to  500.000000
7/13/2011	5:54:59 PM	BCl3 MFC set to  0.000000
7/13/2011	5:54:59 PM	PHl3 MFC set to  0.000000
7/13/2011	5:54:59 PM	SiCl4 MFC set to  0.000000
7/13/2011	5:54:59 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	5:54:59 PM	Tube furnace set to 0
7/13/2011	5:55:00 PM	Helium valve closed
7/13/2011	5:55:00 PM	BCl3 valve closed
7/13/2011	5:55:00 PM	PH3 valve closed
7/13/2011	5:55:00 PM	SiCl4 pre valve closed
7/13/2011	5:55:00 PM	SiCl4 post valve closed
7/13/2011	5:55:00 PM	Main Vac valve closed
7/13/2011	5:55:00 PM	Bypass valve closed
7/13/2011	5:55:00 PM	H2 valve opened
7/13/2011	5:55:00 PM	Bubbler valve opened
7/13/2011	5:55:00 PM	Helium MFC set to  0.000000
7/13/2011	5:55:00 PM	H2 MFC set to  500.000000
7/13/2011	5:55:00 PM	BCl3 MFC set to  0.000000
7/13/2011	5:55:00 PM	PHl3 MFC set to  0.000000
7/13/2011	5:55:00 PM	SiCl4 MFC set to  0.000000
7/13/2011	5:55:00 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	5:55:00 PM	Tube furnace set to 1000
7/13/2011	6:15:00 PM	Helium valve closed
7/13/2011	6:15:00 PM	PH3 valve closed
7/13/2011	6:15:00 PM	Main Vac valve closed
7/13/2011	6:15:00 PM	Bypass valve closed
7/13/2011	6:15:00 PM	H2 valve opened
7/13/2011	6:15:00 PM	BCl3 valve opened
7/13/2011	6:15:00 PM	SiCl4 pre valve opened
7/13/2011	6:15:00 PM	SiCl4 post valve opened
7/13/2011	6:15:00 PM	Bubbler valve opened
7/13/2011	6:15:00 PM	Helium MFC set to  0.000000
7/13/2011	6:15:00 PM	H2 MFC set to  500.000000
7/13/2011	6:15:00 PM	BCl3 MFC set to  2.000000
7/13/2011	6:15:00 PM	PHl3 MFC set to  0.000000
7/13/2011	6:15:00 PM	SiCl4 MFC set to  50.000000
7/13/2011	6:15:00 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	6:15:00 PM	Tube furnace set to 1000
7/13/2011	6:35:00 PM	Helium valve closed
7/13/2011	6:35:00 PM	BCl3 valve closed
7/13/2011	6:35:00 PM	PH3 valve closed
7/13/2011	6:35:00 PM	SiCl4 pre valve closed
7/13/2011	6:35:00 PM	SiCl4 post valve closed
7/13/2011	6:35:00 PM	Main Vac valve closed
7/13/2011	6:35:00 PM	Bypass valve closed
7/13/2011	6:35:00 PM	H2 valve opened
7/13/2011	6:35:00 PM	Bubbler valve opened
7/13/2011	6:35:00 PM	Helium MFC set to  0.000000
7/13/2011	6:35:00 PM	H2 MFC set to  500.000000
7/13/2011	6:35:00 PM	BCl3 MFC set to  0.000000
7/13/2011	6:35:00 PM	PHl3 MFC set to  0.000000
7/13/2011	6:35:00 PM	SiCl4 MFC set to  0.000000
7/13/2011	6:35:00 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	6:35:00 PM	Tube furnace set to 950
7/13/2011	6:38:00 PM	H2 valve closed
7/13/2011	6:38:00 PM	BCl3 valve closed
7/13/2011	6:38:00 PM	PH3 valve closed
7/13/2011	6:38:00 PM	SiCl4 pre valve closed
7/13/2011	6:38:00 PM	SiCl4 post valve closed
7/13/2011	6:38:00 PM	Main Vac valve closed
7/13/2011	6:38:00 PM	Bypass valve closed
7/13/2011	6:38:00 PM	Helium valve opened
7/13/2011	6:38:00 PM	Bubbler valve opened
7/13/2011	6:38:00 PM	Helium MFC set to  500.000000
7/13/2011	6:38:00 PM	H2 MFC set to  0.000000
7/13/2011	6:38:00 PM	BCl3 MFC set to  0.000000
7/13/2011	6:38:00 PM	PHl3 MFC set to  0.000000
7/13/2011	6:38:00 PM	SiCl4 MFC set to  0.000000
7/13/2011	6:38:00 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	6:38:00 PM	Tube furnace set to 900
7/13/2011	6:41:00 PM	H2 valve closed
7/13/2011	6:41:01 PM	BCl3 valve closed
7/13/2011	6:41:01 PM	PH3 valve closed
7/13/2011	6:41:01 PM	SiCl4 pre valve closed
7/13/2011	6:41:01 PM	SiCl4 post valve closed
7/13/2011	6:41:01 PM	Main Vac valve closed
7/13/2011	6:41:01 PM	Bypass valve closed
7/13/2011	6:41:01 PM	Helium valve opened
7/13/2011	6:41:01 PM	Bubbler valve opened
7/13/2011	6:41:01 PM	Helium MFC set to  500.000000
7/13/2011	6:41:01 PM	H2 MFC set to  0.000000
7/13/2011	6:41:01 PM	BCl3 MFC set to  0.000000
7/13/2011	6:41:01 PM	PHl3 MFC set to  0.000000
7/13/2011	6:41:01 PM	SiCl4 MFC set to  0.000000
7/13/2011	6:41:01 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	6:41:01 PM	Tube furnace set to 850
7/13/2011	6:44:01 PM	H2 valve closed
7/13/2011	6:44:01 PM	BCl3 valve closed
7/13/2011	6:44:01 PM	PH3 valve closed
7/13/2011	6:44:01 PM	SiCl4 pre valve closed
7/13/2011	6:44:01 PM	SiCl4 post valve closed
7/13/2011	6:44:01 PM	Main Vac valve closed
7/13/2011	6:44:01 PM	Bypass valve closed
7/13/2011	6:44:01 PM	Helium valve opened
7/13/2011	6:44:01 PM	Bubbler valve opened
7/13/2011	6:44:01 PM	Helium MFC set to  500.000000
7/13/2011	6:44:01 PM	H2 MFC set to  0.000000
7/13/2011	6:44:01 PM	BCl3 MFC set to  0.000000
7/13/2011	6:44:01 PM	PHl3 MFC set to  0.000000
7/13/2011	6:44:01 PM	SiCl4 MFC set to  0.000000
7/13/2011	6:44:01 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	6:44:01 PM	Tube furnace set to 800
7/13/2011	6:47:01 PM	H2 valve closed
7/13/2011	6:47:01 PM	BCl3 valve closed
7/13/2011	6:47:01 PM	PH3 valve closed
7/13/2011	6:47:01 PM	SiCl4 pre valve closed
7/13/2011	6:47:01 PM	SiCl4 post valve closed
7/13/2011	6:47:01 PM	Main Vac valve closed
7/13/2011	6:47:01 PM	Bypass valve closed
7/13/2011	6:47:01 PM	Helium valve opened
7/13/2011	6:47:01 PM	Bubbler valve opened
7/13/2011	6:47:01 PM	Helium MFC set to  500.000000
7/13/2011	6:47:01 PM	H2 MFC set to  0.000000
7/13/2011	6:47:01 PM	BCl3 MFC set to  0.000000
7/13/2011	6:47:01 PM	PHl3 MFC set to  0.000000
7/13/2011	6:47:01 PM	SiCl4 MFC set to  0.000000
7/13/2011	6:47:01 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	6:47:01 PM	Tube furnace set to 750
7/13/2011	6:50:01 PM	H2 valve closed
7/13/2011	6:50:01 PM	BCl3 valve closed
7/13/2011	6:50:01 PM	PH3 valve closed
7/13/2011	6:50:01 PM	SiCl4 pre valve closed
7/13/2011	6:50:01 PM	SiCl4 post valve closed
7/13/2011	6:50:01 PM	Main Vac valve closed
7/13/2011	6:50:01 PM	Bypass valve closed
7/13/2011	6:50:01 PM	Helium valve opened
7/13/2011	6:50:01 PM	Bubbler valve opened
7/13/2011	6:50:01 PM	Helium MFC set to  500.000000
7/13/2011	6:50:01 PM	H2 MFC set to  0.000000
7/13/2011	6:50:01 PM	BCl3 MFC set to  0.000000
7/13/2011	6:50:01 PM	PHl3 MFC set to  0.000000
7/13/2011	6:50:01 PM	SiCl4 MFC set to  0.000000
7/13/2011	6:50:01 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	6:50:01 PM	Tube furnace set to 0
7/13/2011	7:10:01 PM	Helium valve closed
7/13/2011	7:10:01 PM	H2 valve closed
7/13/2011	7:10:01 PM	BCl3 valve closed
7/13/2011	7:10:01 PM	PH3 valve closed
7/13/2011	7:10:01 PM	SiCl4 pre valve closed
7/13/2011	7:10:01 PM	SiCl4 post valve closed
7/13/2011	7:10:01 PM	Main Vac valve closed
7/13/2011	7:10:01 PM	Bypass valve closed
7/13/2011	7:10:01 PM	Bubbler valve closed
7/13/2011	7:10:01 PM	Helium MFC set to  0.000000
7/13/2011	7:10:01 PM	H2 MFC set to  0.000000
7/13/2011	7:10:01 PM	BCl3 MFC set to  0.000000
7/13/2011	7:10:01 PM	PHl3 MFC set to  0.000000
7/13/2011	7:10:01 PM	SiCl4 MFC set to  0.000000
7/13/2011	7:10:01 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	7:10:01 PM	Tube furnace set to 0
7/13/2011	7:10:02 PM	Run finished at 7:10 PM
7/13/2011	7:24:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2011	7:24:38 PM	Recipe started at 7:24 PM
7/13/2011	7:24:38 PM	Helium valve closed
7/13/2011	7:24:38 PM	H2 valve closed
7/13/2011	7:24:38 PM	BCl3 valve closed
7/13/2011	7:24:38 PM	PH3 valve closed
7/13/2011	7:24:38 PM	SiCl4 pre valve closed
7/13/2011	7:24:38 PM	SiCl4 post valve closed
7/13/2011	7:24:38 PM	Main Vac valve closed
7/13/2011	7:24:38 PM	Bypass valve closed
7/13/2011	7:24:38 PM	Bubbler valve closed
7/13/2011	7:24:38 PM	Helium MFC set to  0.000000
7/13/2011	7:24:38 PM	H2 MFC set to  0.000000
7/13/2011	7:24:38 PM	BCl3 MFC set to  0.000000
7/13/2011	7:24:38 PM	PHl3 MFC set to  0.000000
7/13/2011	7:24:38 PM	SiCl4 MFC set to  0.000000
7/13/2011	7:24:38 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	7:24:38 PM	Tube furnace set to 0
7/13/2011	7:24:41 PM	H2 valve closed
7/13/2011	7:24:41 PM	BCl3 valve closed
7/13/2011	7:24:41 PM	PH3 valve closed
7/13/2011	7:24:41 PM	SiCl4 pre valve closed
7/13/2011	7:24:41 PM	SiCl4 post valve closed
7/13/2011	7:24:41 PM	Main Vac valve closed
7/13/2011	7:24:41 PM	Bypass valve closed
7/13/2011	7:24:41 PM	Bubbler valve closed
7/13/2011	7:24:41 PM	Helium valve opened
7/13/2011	7:24:41 PM	Helium MFC set to  500.000000
7/13/2011	7:24:41 PM	H2 MFC set to  0.000000
7/13/2011	7:24:41 PM	BCl3 MFC set to  0.000000
7/13/2011	7:24:41 PM	PHl3 MFC set to  0.000000
7/13/2011	7:24:41 PM	SiCl4 MFC set to  0.000000
7/13/2011	7:24:41 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	7:24:41 PM	Tube furnace set to 0
7/13/2011	7:24:47 PM	Helium valve closed
7/13/2011	7:24:47 PM	H2 valve closed
7/13/2011	7:24:47 PM	BCl3 valve closed
7/13/2011	7:24:47 PM	PH3 valve closed
7/13/2011	7:24:47 PM	SiCl4 pre valve closed
7/13/2011	7:24:47 PM	SiCl4 post valve closed
7/13/2011	7:24:47 PM	Main Vac valve closed
7/13/2011	7:24:47 PM	Bypass valve closed
7/13/2011	7:24:47 PM	Bubbler valve closed
7/13/2011	7:24:47 PM	Helium MFC set to  0.000000
7/13/2011	7:24:47 PM	H2 MFC set to  0.000000
7/13/2011	7:24:47 PM	BCl3 MFC set to  0.000000
7/13/2011	7:24:47 PM	PHl3 MFC set to  0.000000
7/13/2011	7:24:47 PM	SiCl4 MFC set to  0.000000
7/13/2011	7:24:47 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	7:24:47 PM	Tube furnace set to 0
7/13/2011	7:24:48 PM	Run finished at 7:24 PM
7/13/2011	7:24:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/13/2011	7:28:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/13/2011	7:28:47 PM	Recipe started at 7:28 PM
7/13/2011	7:28:47 PM	Helium valve closed
7/13/2011	7:28:47 PM	H2 valve closed
7/13/2011	7:28:47 PM	BCl3 valve closed
7/13/2011	7:28:47 PM	PH3 valve closed
7/13/2011	7:28:47 PM	SiCl4 pre valve closed
7/13/2011	7:28:47 PM	SiCl4 post valve closed
7/13/2011	7:28:47 PM	Main Vac valve closed
7/13/2011	7:28:47 PM	Bubbler valve closed
7/13/2011	7:28:47 PM	Bypass valve opened
7/13/2011	7:28:47 PM	Helium MFC set to  0.000000
7/13/2011	7:28:47 PM	H2 MFC set to  0.000000
7/13/2011	7:28:47 PM	BCl3 MFC set to  0.000000
7/13/2011	7:28:47 PM	PHl3 MFC set to  0.000000
7/13/2011	7:28:47 PM	SiCl4 MFC set to  0.000000
7/13/2011	7:28:47 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	7:28:47 PM	Tube furnace set to 0
7/13/2011	7:29:46 PM	Helium valve closed
7/13/2011	7:29:46 PM	H2 valve closed
7/13/2011	7:29:46 PM	BCl3 valve closed
7/13/2011	7:29:46 PM	PH3 valve closed
7/13/2011	7:29:46 PM	SiCl4 pre valve closed
7/13/2011	7:29:46 PM	SiCl4 post valve closed
7/13/2011	7:29:46 PM	Main Vac valve closed
7/13/2011	7:29:46 PM	Bubbler valve closed
7/13/2011	7:29:46 PM	Bypass valve opened
7/13/2011	7:29:46 PM	Helium MFC set to  0.000000
7/13/2011	7:29:46 PM	H2 MFC set to  0.000000
7/13/2011	7:29:46 PM	BCl3 MFC set to  0.000000
7/13/2011	7:29:46 PM	PHl3 MFC set to  0.000000
7/13/2011	7:29:46 PM	SiCl4 MFC set to  0.000000
7/13/2011	7:29:46 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	7:29:46 PM	Tube furnace set to 0
7/13/2011	7:29:50 PM	Helium valve closed
7/13/2011	7:29:50 PM	H2 valve closed
7/13/2011	7:29:50 PM	BCl3 valve closed
7/13/2011	7:29:50 PM	PH3 valve closed
7/13/2011	7:29:50 PM	SiCl4 pre valve closed
7/13/2011	7:29:50 PM	SiCl4 post valve closed
7/13/2011	7:29:50 PM	Bypass valve closed
7/13/2011	7:29:50 PM	Bubbler valve closed
7/13/2011	7:29:50 PM	Main Vac valve opened
7/13/2011	7:29:50 PM	Helium MFC set to  0.000000
7/13/2011	7:29:50 PM	H2 MFC set to  0.000000
7/13/2011	7:29:50 PM	BCl3 MFC set to  0.000000
7/13/2011	7:29:50 PM	PHl3 MFC set to  0.000000
7/13/2011	7:29:50 PM	SiCl4 MFC set to  0.000000
7/13/2011	7:29:50 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	7:29:50 PM	Tube furnace set to 0
7/13/2011	7:29:51 PM	Run finished at 7:29 PM
7/13/2011	7:29:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/13/2011	9:28:35 PM	Main Vac valve closed
7/13/2011	9:28:46 PM	Main Vac valve opened
7/13/2011	9:29:09 PM	Recipe started at 9:29 PM
7/13/2011	9:29:09 PM	Helium valve closed
7/13/2011	9:29:09 PM	H2 valve closed
7/13/2011	9:29:09 PM	BCl3 valve closed
7/13/2011	9:29:09 PM	PH3 valve closed
7/13/2011	9:29:09 PM	SiCl4 pre valve closed
7/13/2011	9:29:09 PM	SiCl4 post valve closed
7/13/2011	9:29:09 PM	Main Vac valve closed
7/13/2011	9:29:09 PM	Bypass valve closed
7/13/2011	9:29:09 PM	Bubbler valve closed
7/13/2011	9:29:09 PM	Helium MFC set to  0.000000
7/13/2011	9:29:09 PM	H2 MFC set to  0.000000
7/13/2011	9:29:09 PM	BCl3 MFC set to  0.000000
7/13/2011	9:29:09 PM	PHl3 MFC set to  0.000000
7/13/2011	9:29:09 PM	SiCl4 MFC set to  0.000000
7/13/2011	9:29:09 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	9:29:09 PM	Tube furnace set to 0
7/13/2011	9:29:12 PM	Helium valve closed
7/13/2011	9:29:12 PM	BCl3 valve closed
7/13/2011	9:29:12 PM	PH3 valve closed
7/13/2011	9:29:12 PM	SiCl4 pre valve closed
7/13/2011	9:29:12 PM	SiCl4 post valve closed
7/13/2011	9:29:12 PM	Main Vac valve closed
7/13/2011	9:29:12 PM	Bypass valve closed
7/13/2011	9:29:12 PM	Bubbler valve closed
7/13/2011	9:29:12 PM	H2 valve opened
7/13/2011	9:29:12 PM	Helium MFC set to  0.000000
7/13/2011	9:29:12 PM	H2 MFC set to  500.000000
7/13/2011	9:29:12 PM	BCl3 MFC set to  0.000000
7/13/2011	9:29:12 PM	PHl3 MFC set to  0.000000
7/13/2011	9:29:12 PM	SiCl4 MFC set to  0.000000
7/13/2011	9:29:12 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	9:29:12 PM	Tube furnace set to 0
7/13/2011	9:30:17 PM	Helium valve closed
7/13/2011	9:30:17 PM	BCl3 valve closed
7/13/2011	9:30:17 PM	PH3 valve closed
7/13/2011	9:30:17 PM	SiCl4 pre valve closed
7/13/2011	9:30:17 PM	SiCl4 post valve closed
7/13/2011	9:30:17 PM	Main Vac valve closed
7/13/2011	9:30:17 PM	Bypass valve closed
7/13/2011	9:30:17 PM	H2 valve opened
7/13/2011	9:30:17 PM	Bubbler valve opened
7/13/2011	9:30:17 PM	Helium MFC set to  0.000000
7/13/2011	9:30:17 PM	H2 MFC set to  500.000000
7/13/2011	9:30:17 PM	BCl3 MFC set to  0.000000
7/13/2011	9:30:17 PM	PHl3 MFC set to  0.000000
7/13/2011	9:30:17 PM	SiCl4 MFC set to  0.000000
7/13/2011	9:30:17 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	9:30:17 PM	Tube furnace set to 0
7/13/2011	9:30:18 PM	Helium valve closed
7/13/2011	9:30:18 PM	BCl3 valve closed
7/13/2011	9:30:18 PM	PH3 valve closed
7/13/2011	9:30:18 PM	SiCl4 pre valve closed
7/13/2011	9:30:18 PM	SiCl4 post valve closed
7/13/2011	9:30:18 PM	Main Vac valve closed
7/13/2011	9:30:18 PM	Bypass valve closed
7/13/2011	9:30:18 PM	H2 valve opened
7/13/2011	9:30:18 PM	Bubbler valve opened
7/13/2011	9:30:18 PM	Helium MFC set to  0.000000
7/13/2011	9:30:18 PM	H2 MFC set to  500.000000
7/13/2011	9:30:18 PM	BCl3 MFC set to  0.000000
7/13/2011	9:30:18 PM	PHl3 MFC set to  0.000000
7/13/2011	9:30:18 PM	SiCl4 MFC set to  0.000000
7/13/2011	9:30:18 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	9:30:18 PM	Tube furnace set to 1000
7/13/2011	9:50:18 PM	Helium valve closed
7/13/2011	9:50:18 PM	PH3 valve closed
7/13/2011	9:50:18 PM	Main Vac valve closed
7/13/2011	9:50:18 PM	Bypass valve closed
7/13/2011	9:50:18 PM	H2 valve opened
7/13/2011	9:50:18 PM	BCl3 valve opened
7/13/2011	9:50:18 PM	SiCl4 pre valve opened
7/13/2011	9:50:18 PM	SiCl4 post valve opened
7/13/2011	9:50:18 PM	Bubbler valve opened
7/13/2011	9:50:18 PM	Helium MFC set to  0.000000
7/13/2011	9:50:18 PM	H2 MFC set to  500.000000
7/13/2011	9:50:18 PM	BCl3 MFC set to  4.000000
7/13/2011	9:50:18 PM	PHl3 MFC set to  0.000000
7/13/2011	9:50:18 PM	SiCl4 MFC set to  50.000000
7/13/2011	9:50:18 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	9:50:18 PM	Tube furnace set to 1000
7/13/2011	10:10:18 PM	Helium valve closed
7/13/2011	10:10:18 PM	BCl3 valve closed
7/13/2011	10:10:18 PM	PH3 valve closed
7/13/2011	10:10:18 PM	SiCl4 pre valve closed
7/13/2011	10:10:18 PM	SiCl4 post valve closed
7/13/2011	10:10:18 PM	Main Vac valve closed
7/13/2011	10:10:18 PM	Bypass valve closed
7/13/2011	10:10:18 PM	H2 valve opened
7/13/2011	10:10:18 PM	Bubbler valve opened
7/13/2011	10:10:18 PM	Helium MFC set to  0.000000
7/13/2011	10:10:18 PM	H2 MFC set to  500.000000
7/13/2011	10:10:18 PM	BCl3 MFC set to  0.000000
7/13/2011	10:10:18 PM	PHl3 MFC set to  0.000000
7/13/2011	10:10:18 PM	SiCl4 MFC set to  0.000000
7/13/2011	10:10:18 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	10:10:19 PM	Tube furnace set to 950
7/13/2011	10:13:19 PM	H2 valve closed
7/13/2011	10:13:19 PM	BCl3 valve closed
7/13/2011	10:13:19 PM	PH3 valve closed
7/13/2011	10:13:19 PM	SiCl4 pre valve closed
7/13/2011	10:13:19 PM	SiCl4 post valve closed
7/13/2011	10:13:19 PM	Main Vac valve closed
7/13/2011	10:13:19 PM	Bypass valve closed
7/13/2011	10:13:19 PM	Helium valve opened
7/13/2011	10:13:19 PM	Bubbler valve opened
7/13/2011	10:13:19 PM	Helium MFC set to  500.000000
7/13/2011	10:13:19 PM	H2 MFC set to  0.000000
7/13/2011	10:13:19 PM	BCl3 MFC set to  0.000000
7/13/2011	10:13:19 PM	PHl3 MFC set to  0.000000
7/13/2011	10:13:19 PM	SiCl4 MFC set to  0.000000
7/13/2011	10:13:19 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	10:13:19 PM	Tube furnace set to 900
7/13/2011	10:16:19 PM	H2 valve closed
7/13/2011	10:16:19 PM	BCl3 valve closed
7/13/2011	10:16:19 PM	PH3 valve closed
7/13/2011	10:16:19 PM	SiCl4 pre valve closed
7/13/2011	10:16:19 PM	SiCl4 post valve closed
7/13/2011	10:16:19 PM	Main Vac valve closed
7/13/2011	10:16:19 PM	Bypass valve closed
7/13/2011	10:16:19 PM	Helium valve opened
7/13/2011	10:16:19 PM	Bubbler valve opened
7/13/2011	10:16:19 PM	Helium MFC set to  500.000000
7/13/2011	10:16:19 PM	H2 MFC set to  0.000000
7/13/2011	10:16:19 PM	BCl3 MFC set to  0.000000
7/13/2011	10:16:19 PM	PHl3 MFC set to  0.000000
7/13/2011	10:16:19 PM	SiCl4 MFC set to  0.000000
7/13/2011	10:16:19 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	10:16:19 PM	Tube furnace set to 850
7/13/2011	10:19:19 PM	H2 valve closed
7/13/2011	10:19:19 PM	BCl3 valve closed
7/13/2011	10:19:19 PM	PH3 valve closed
7/13/2011	10:19:19 PM	SiCl4 pre valve closed
7/13/2011	10:19:19 PM	SiCl4 post valve closed
7/13/2011	10:19:19 PM	Main Vac valve closed
7/13/2011	10:19:19 PM	Bypass valve closed
7/13/2011	10:19:19 PM	Helium valve opened
7/13/2011	10:19:19 PM	Bubbler valve opened
7/13/2011	10:19:19 PM	Helium MFC set to  500.000000
7/13/2011	10:19:19 PM	H2 MFC set to  0.000000
7/13/2011	10:19:19 PM	BCl3 MFC set to  0.000000
7/13/2011	10:19:19 PM	PHl3 MFC set to  0.000000
7/13/2011	10:19:19 PM	SiCl4 MFC set to  0.000000
7/13/2011	10:19:19 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	10:19:19 PM	Tube furnace set to 800
7/13/2011	10:22:19 PM	H2 valve closed
7/13/2011	10:22:19 PM	BCl3 valve closed
7/13/2011	10:22:19 PM	PH3 valve closed
7/13/2011	10:22:19 PM	SiCl4 pre valve closed
7/13/2011	10:22:19 PM	SiCl4 post valve closed
7/13/2011	10:22:19 PM	Main Vac valve closed
7/13/2011	10:22:19 PM	Bypass valve closed
7/13/2011	10:22:19 PM	Helium valve opened
7/13/2011	10:22:19 PM	Bubbler valve opened
7/13/2011	10:22:19 PM	Helium MFC set to  500.000000
7/13/2011	10:22:19 PM	H2 MFC set to  0.000000
7/13/2011	10:22:19 PM	BCl3 MFC set to  0.000000
7/13/2011	10:22:19 PM	PHl3 MFC set to  0.000000
7/13/2011	10:22:19 PM	SiCl4 MFC set to  0.000000
7/13/2011	10:22:19 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	10:22:19 PM	Tube furnace set to 750
7/13/2011	10:25:19 PM	H2 valve closed
7/13/2011	10:25:19 PM	BCl3 valve closed
7/13/2011	10:25:19 PM	PH3 valve closed
7/13/2011	10:25:19 PM	SiCl4 pre valve closed
7/13/2011	10:25:19 PM	SiCl4 post valve closed
7/13/2011	10:25:19 PM	Main Vac valve closed
7/13/2011	10:25:19 PM	Bypass valve closed
7/13/2011	10:25:19 PM	Helium valve opened
7/13/2011	10:25:19 PM	Bubbler valve opened
7/13/2011	10:25:19 PM	Helium MFC set to  500.000000
7/13/2011	10:25:19 PM	H2 MFC set to  0.000000
7/13/2011	10:25:19 PM	BCl3 MFC set to  0.000000
7/13/2011	10:25:19 PM	PHl3 MFC set to  0.000000
7/13/2011	10:25:19 PM	SiCl4 MFC set to  0.000000
7/13/2011	10:25:19 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	10:25:20 PM	Tube furnace set to 0
7/13/2011	10:29:58 PM	Run aborted at 10:29 PM
7/13/2011	10:29:58 PM	Helium valve closed
7/13/2011	10:29:58 PM	H2 valve closed
7/13/2011	10:29:58 PM	BCl3 valve closed
7/13/2011	10:29:58 PM	PH3 valve closed
7/13/2011	10:29:58 PM	SiCl4 pre valve closed
7/13/2011	10:29:58 PM	SiCl4 post valve closed
7/13/2011	10:29:58 PM	Bypass valve closed
7/13/2011	10:29:58 PM	Main Vac valve closed
7/13/2011	10:29:58 PM	Bubbler valve closed
7/13/2011	10:29:58 PM	Helium MFC set to  0.000000
7/13/2011	10:29:58 PM	H2 MFC set to  0.000000
7/13/2011	10:29:58 PM	BCl3 MFC set to  0.000000
7/13/2011	10:29:58 PM	PHl3 MFC set to  0.000000
7/13/2011	10:29:58 PM	SiCl4 MFC set to  0.000000
7/13/2011	10:29:58 PM	Tube furnace set to 0
7/13/2011	10:37:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/13/2011	10:37:35 PM	Recipe started at 10:37 PM
7/13/2011	10:37:35 PM	Helium valve closed
7/13/2011	10:37:35 PM	H2 valve closed
7/13/2011	10:37:35 PM	BCl3 valve closed
7/13/2011	10:37:35 PM	PH3 valve closed
7/13/2011	10:37:35 PM	SiCl4 pre valve closed
7/13/2011	10:37:35 PM	SiCl4 post valve closed
7/13/2011	10:37:35 PM	Main Vac valve closed
7/13/2011	10:37:35 PM	Bubbler valve closed
7/13/2011	10:37:35 PM	Bypass valve opened
7/13/2011	10:37:35 PM	Helium MFC set to  0.000000
7/13/2011	10:37:35 PM	H2 MFC set to  0.000000
7/13/2011	10:37:35 PM	BCl3 MFC set to  0.000000
7/13/2011	10:37:35 PM	PHl3 MFC set to  0.000000
7/13/2011	10:37:35 PM	SiCl4 MFC set to  0.000000
7/13/2011	10:37:35 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	10:37:35 PM	Tube furnace set to 0
7/13/2011	10:38:37 PM	Helium valve closed
7/13/2011	10:38:37 PM	H2 valve closed
7/13/2011	10:38:37 PM	BCl3 valve closed
7/13/2011	10:38:37 PM	PH3 valve closed
7/13/2011	10:38:37 PM	SiCl4 pre valve closed
7/13/2011	10:38:37 PM	SiCl4 post valve closed
7/13/2011	10:38:37 PM	Main Vac valve closed
7/13/2011	10:38:37 PM	Bubbler valve closed
7/13/2011	10:38:37 PM	Bypass valve opened
7/13/2011	10:38:37 PM	Helium MFC set to  0.000000
7/13/2011	10:38:37 PM	H2 MFC set to  0.000000
7/13/2011	10:38:37 PM	BCl3 MFC set to  0.000000
7/13/2011	10:38:37 PM	PHl3 MFC set to  0.000000
7/13/2011	10:38:37 PM	SiCl4 MFC set to  0.000000
7/13/2011	10:38:37 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	10:38:37 PM	Tube furnace set to 0
7/13/2011	10:39:37 PM	Helium valve closed
7/13/2011	10:39:37 PM	H2 valve closed
7/13/2011	10:39:37 PM	BCl3 valve closed
7/13/2011	10:39:37 PM	PH3 valve closed
7/13/2011	10:39:37 PM	SiCl4 pre valve closed
7/13/2011	10:39:37 PM	SiCl4 post valve closed
7/13/2011	10:39:37 PM	Bypass valve closed
7/13/2011	10:39:37 PM	Bubbler valve closed
7/13/2011	10:39:37 PM	Main Vac valve opened
7/13/2011	10:39:37 PM	Helium MFC set to  0.000000
7/13/2011	10:39:37 PM	H2 MFC set to  0.000000
7/13/2011	10:39:37 PM	BCl3 MFC set to  0.000000
7/13/2011	10:39:37 PM	PHl3 MFC set to  0.000000
7/13/2011	10:39:37 PM	SiCl4 MFC set to  0.000000
7/13/2011	10:39:37 PM	Bypass solenoid MFC set to  0.000000
7/13/2011	10:39:37 PM	Tube furnace set to 0
7/13/2011	10:39:38 PM	Run finished at 10:39 PM
7/13/2011	10:39:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
